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Semitron MPR1000 : Mitsubishi Chemical Advanced Materials

Semitron MPR1000 - maximum plasma resistance, exclusively from Mitsubishi Chemical Advanced Materials, designed to fill the performance gap in traditional wet & dry semiconductor processing in severe vacuum chamber conditions. Less expensive than ceramics, stronger than breakage-prone quartz, survives aggressive plasma chemistries & ultra clean in nature. Another benefit is it's cleanliness in the form of low ionic metal content and low out-gassing.

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